Dielectric strength of SiO2 depending on temperature ???

Mario Kupnik kupnik at stanford.edu
Wed Jun 15 11:26:05 PDT 2005


Hi all,

Does anyone know (or a reference) how the dielectric strength of thermal
grown SiO2 (dry oxidation, > 1 micron) behaves over a wide temperature
range, i.e. from 300K up to 1300K !!! I know that it will go down
drastically with temperature.

I found a lot of information for room temperature and temperatures
up to 400K but nothing for this range. 

Thanks a lot !

Mario Kupnik
 
Edward L. Ginzton Laboratory
Stanford University
450 Via Palou
Stanford, CA 94305-4088
Phone: 650-723-0150
Fax: 650-725-3890
E-mail: kupnik at stanford.edu





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