photolithography hystory book

Marco Rolandi marco.rolandi at
Tue Jun 21 15:26:33 PDT 2005

 does anybody know of a good book, review article or website on the history 
of photolithography for semiconductor fabrication?
I do not need anything too detailed, but something with the dates of the 
milestones and with and explanation of why is it called lithography.

Marco Rolandi
PhD Candidate Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
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