photolithography hystory book

Marco Rolandi marco.rolandi at gmail.com
Tue Jun 21 15:26:33 PDT 2005


Hello,
 does anybody know of a good book, review article or website on the history 
of photolithography for semiconductor fabrication?
I do not need anything too detailed, but something with the dates of the 
milestones and with and explanation of why is it called lithography.
 Thanks,
Marco.

-- 
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Marco Rolandi
PhD Candidate Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
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