photolithography hystory book

[Marco Rolandi]

Hello,
 does anybody know of a good book, review article or website on the history 
of photolithography for semiconductor fabrication?
I do not need anything too detailed, but something with the dates of the 
milestones and with and explanation of why is it called lithography.
 Thanks,
Marco.

-- 
-----------------------------------------------------------------
Marco Rolandi
PhD Candidate Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20050621/28c2b5bd/attachment.html>