photolithography hystory book

Adrian Tymes wingcat at pacbell.net
Tue Jun 21 16:00:48 PDT 2005


http://en.wikipedia.org/wiki/Lithography
and follow links from there, as relevant to your query.  Also google on
"history of lithography".

--- Marco Rolandi <marco.rolandi at gmail.com> wrote:

> Hello,
>  does anybody know of a good book, review article or website on the
> history 
> of photolithography for semiconductor fabrication?
> I do not need anything too detailed, but something with the dates of
> the 
> milestones and with and explanation of why is it called lithography.
>  Thanks,
> Marco.
> 
> -- 
> -----------------------------------------------------------------
> Marco Rolandi
> PhD Candidate Department of Applied Physics
> 
> Dai Group
> Department of Chemistry
> Stanford University
> Stanford, 94305
> phone: (650) 725-9156
> 




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