Temporary loss of temp control

Mary Tang mtang at snf.stanford.edu
Tue Jun 28 13:13:42 PDT 2005


Hello --

We've just been informed by facilities of a steam valve failure.  This 
is being replaced now, but the failure may regretfully result in some 
loss of temperature control in the lab.  If you have sensitive 
processing in the litho area, please be aware of this.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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