Temporary loss of temp control
mtang at snf.stanford.edu
Tue Jun 28 13:13:42 PDT 2005
We've just been informed by facilities of a steam valve failure. This
is being replaced now, but the failure may regretfully result in some
loss of temperature control in the lab. If you have sensitive
processing in the litho area, please be aware of this.
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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