Fab temperature is under control again

Dick Crane rcrane at snf.stanford.edu
Tue Jun 28 15:00:42 PDT 2005


Back to normal operation:

The high pressure steam modulating valve has been successfully replaced 
and the fab temperatures are returning to normal.

Thanks for your patience,

Dick

-------- Original Message --------
Subject: 	Temporary loss of temp control
Date: 	Tue, 28 Jun 2005 13:13:42 -0700
From: 	Mary Tang <mtang at snf.stanford.edu>
Organization: 	Stanford Nanofabrication Facility
To: 	labmembers at snf.stanford.edu



Hello --

We've just been informed by facilities of a steam valve failure.  This 
is being replaced now, but the failure may regretfully result in some 
loss of temperature control in the lab.  If you have sensitive 
processing in the litho area, please be aware of this.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu


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