Fab temperature is under control again
rcrane at snf.stanford.edu
Tue Jun 28 15:00:42 PDT 2005
Back to normal operation:
The high pressure steam modulating valve has been successfully replaced
and the fab temperatures are returning to normal.
Thanks for your patience,
-------- Original Message --------
Subject: Temporary loss of temp control
Date: Tue, 28 Jun 2005 13:13:42 -0700
From: Mary Tang <mtang at snf.stanford.edu>
Organization: Stanford Nanofabrication Facility
To: labmembers at snf.stanford.edu
We've just been informed by facilities of a steam valve failure. This
is being replaced now, but the failure may regretfully result in some
loss of temperature control in the lab. If you have sensitive
processing in the litho area, please be aware of this.
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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