From jerabek at snf.stanford.edu Wed Mar 2 08:47:21 2005 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Wed, 2 Mar 2005 08:47:21 -0800 (PST) Subject: Laser mask writer Message-ID: To whom it may concern: Micronic mask laser writer is down due to a stage homing problem. Micronic field service has been called and will address the problem. -Paul From pruitt at stanford.edu Wed Mar 2 14:38:46 2005 From: pruitt at stanford.edu (Beth Pruitt) Date: Wed, 2 Mar 2005 14:38:46 -0800 Subject: this Friday: seminar on nanoimprint lithography and resists Message-ID: special seminar Polymers for thermal nanoimprinting - Available series and recent developments 11am this Friday March 4 Packard 101 Dr. Freimut Reuther Photoresists & Nanotechnology micro resist technology GmbH Berlin, GERMANY email: f.reuther at microresist.de From shott at snf.stanford.edu Thu Mar 3 15:53:08 2005 From: shott at snf.stanford.edu (John Shott) Date: Thu, 03 Mar 2005 15:53:08 -0800 Subject: Possible virus/phishing that is masquerading as a warning about spam!!! Message-ID: <4227A364.7080102@snf.stanford.edu> An HTML attachment was scrubbed... URL: From guerra at par.stanford.edu Thu Mar 3 18:46:18 2005 From: guerra at par.stanford.edu (Ann Guerra) Date: Thu, 3 Mar 2005 18:46:18 -0800 (PST) Subject: EE310 Integrated Circuits Seminar, 3/8/05 Message-ID: EE310 Integrated Circuits Technology and Design Seminar "The Future of Complementary Bipolar" Dennis Monticelli National Semiconductor Corporation Tuesday, March 8, 2005 4:15 p.m. Building 380, Room 380Y ABSTRACT While the bipolar comeback in the form of high speed NPNs was making headlines in wireless and optical broadband, a less touted area, that of the complementary bipolar processes, was making headway of its own. Certain applications benefit greatly from symmetry of output drive and those applications were growing. Analog processing of video signals and DSL cable driving requires a difficult combination of wide bandwidth, precise gain & phase, and high linearity. Complementary devices in the signal path and output stages of operational amplifiers naturally preserve linearity and the high gain of bipolar allows greater use of negative feedback for a given power consumption. While newer applications such as laser diode drivers drove up the speed, capacitive load applications such as FPD drivers drove down power consumption and cost. Meanwhile, the technology was being conveniently applied to families of general purpose amplifiers that touted excellent rail-to-rail characteristics. The process roadmap for complementary bipolar stands apart from the others. The active devices are expected to achieve a very tough combination of DC accuracy and AC bandwidth at superior supply voltages while operating on a paucity of current. Because the weakest device dominates the performance specifications, much effort goes into bringing PNP performance up to near NPN levels despite the hole vs electron handicap. Bonded SOI wafers and companion CMOS modules are also employed. Incorporation of SiGe into the PNP as well as the NPN, while far from straightforward, opens up a new dimension in complementary bipolar processes. From jerabek at snf.stanford.edu Fri Mar 4 10:42:52 2005 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Fri, 4 Mar 2005 10:42:52 -0800 (PST) Subject: Micronic laser writer Message-ID: To whom it may concern: Micronic mask writer problem with stage homing was repaired (faulty sensor). System is back on line. -Paul From kone at stanford.edu Fri Mar 4 10:59:10 2005 From: kone at stanford.edu (Amy Lee) Date: Fri, 4 Mar 2005 10:59:10 -0800 Subject: NOW: seminar on nanoimprint lithography and resists Message-ID: <000001c520ec$4384e240$4b5e40ab@K> special seminar Polymers for thermal nanoimprinting - Available series and recent developments 11am this Friday March 4 Packard 101 Dr. Freimut Reuther Photoresists & Nanotechnology micro resist technology GmbH Berlin, GERMANY email: f.reuther at microresist.de From john.wasserbauer at earthlink.net Mon Mar 7 15:43:39 2005 From: john.wasserbauer at earthlink.net (John Wasserbauer) Date: Mon, 7 Mar 2005 15:43:39 -0800 Subject: PI2611 polyimide Message-ID: <001801c5236f$7dbeb780$6b00a8c0@Dexter> Dear Users, If anyone has a quantity of or experience with PI2611 polyimide, please contact me at your earliest convenience. Thank you. John Wasserbauer Group4 Labs 510-387-2476 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerabek at snf.stanford.edu Tue Mar 8 09:50:59 2005 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Tue, 8 Mar 2005 09:50:59 -0800 (PST) Subject: Micronic mask writer Message-ID: To whom it may concern: Micronic mask writer is down again with a stage problem. Micronic field service has been called, however earliest time they can come is Wednesday 3/9/05. -Paul From mtang at snf.stanford.edu Tue Mar 8 10:53:39 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 08 Mar 2005 10:53:39 -0800 Subject: TEM Sample prep service, now at SNL Message-ID: <422DF4B3.7040308@snf.stanford.edu> Hi everyone -- I'm conveying an imporant message, which I'm paraphrasing here, from Richard Chin at SNL. SNL(Stanford Nanocharacterization Lab, now part of the NNIN) is now offering site-specific TEM sample prep by FIB as a consulting service for labmembers who need a few samples made. If you would like to have TEM done, but are a bit daunted by the sample prep process, please contact Rich Chin at rwchin at stanford.edu The hourly rate will be at the standard consulting fee of $140/hour. It still behooves labmembers who need a lot of TEM done to learn the sample prep methods themselves (SNL staff provides training.) However, this new service will certainly be a an efficient way to get high quality TEM done, without the steep learning curve. The SNL website is at: http://www.stanford.edu/group/snl Thanks for your attention -- M -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mdeal at stanford.edu Wed Mar 9 14:50:32 2005 From: mdeal at stanford.edu (Michael Deal) Date: Wed, 09 Mar 2005 14:50:32 -0800 Subject: SNF/Stanford Community Day Message-ID: <6.1.1.1.2.20050309144904.02021438@mdeal.pobox.stanford.edu> SNF labmembers, For the second year, SNF will participate in Stanford University's "Community Day." This is where adults and children from the neighboring cities are invited to Stanford on a Spring Sunday to visit the campus, and dozens of university organizations put on displays and demonstrations. Last year we had a very successful and fun day in which we taught the community about nanotechnology. We had a table on the other side of Packard where we had posters, free handouts (ruler/magnifying glasses), microscope demos (where they could see structure built in our lab), and the very popular "be a junior nanoscientist (where kids put on a cleanroom suit, got the photo taken, and got a nanoscientist certificate with their name and picture on it.) We also gave tours of the cleanroom every few hours. Last year it was mostly SNF staff helping with the activities. This year I'd like to invite both staff and SNF labmembers to volunteer. The more people who participate, the more fun it will be for all of us. Community Day will be Sunday, April 10 from 10 am to 4pm. You can work part or all of it (we'll need a few here at 9am to help set up). We have lots of fun, and free lunch as well. Based on the success of last year, and the fact that only 30% of Community Day attendees are repeaters from before, we plan on doing basically the same thing as last year. But we would entertain any suggestions for other suggestions. We'll have a planning meeting, but it isn't necessary to attend that in order to help out on the actual day. So if you are interested in helping outand particpating in SNF's nano activities at Community Day (April 10), please reply to me as soon as you can. Thanks! -Mike Deal, SNF Director of Special Programs From mjarrahi at stanford.edu Wed Mar 9 22:17:25 2005 From: mjarrahi at stanford.edu (Mona Jarrahi) Date: Wed, 9 Mar 2005 22:17:25 -0800 Subject: Do you have access to BCB? Message-ID: <1110435445.422fe6756fde9@webmail.stanford.edu> Hello everyone, I wonder if anyone is using BCB or is aware of BCB stored somewhere in the university. I have to use a little amount of BCB for my process, however, the smallest amount I can get is 3000$! I would appreciate if you can help me find some in the university. Thanks, -Mona From jerabek at snf.stanford.edu Fri Mar 11 10:14:53 2005 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Fri, 11 Mar 2005 10:14:53 -0800 (PST) Subject: Micronic mask writer Message-ID: To whom it may concern: Micronic mask writer is bach on line after some adjustments to the stage flight hight. -Paul From mtang at snf.stanford.edu Mon Mar 14 06:58:53 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 14 Mar 2005 06:58:53 -0800 Subject: [Fwd: Course Announcement: MEMS Laboratory] Message-ID: <4235A6AD.5020908@snf.stanford.edu> -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- An embedded message was scrubbed... From: "Amy Lee" Subject: Course Announcement: MEMS Laboratory Date: Fri, 11 Mar 2005 16:44:52 -0800 Size: 3170 URL: From rcrane at snf.stanford.edu Mon Mar 14 11:12:31 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 14 Mar 2005 11:12:31 -0800 Subject: Future furnace area shutdown August 15 Message-ID: <4235E21F.6050907@snf.stanford.edu> Fab users, Furnace area disruption alert, August 15, 2005. The next step to modernize the diffusion furnaces will happen this summer. Tylan bank 4 will be replaced by Thermco Bank 2. This upgrade will require a shutdown of thermco furnace bank 1 and tylan banks 2, 3, and 4 for two weeks starting around August 15. I believe the two weeks quoted is generous and the actual time may be less than 1 1/2 weeks. This schedule should avoid conflict with IEDM and MEMS conference paper deadlines and has the support of Mechanical Engineering Dept. and the Solid State and Photonics Labs. Please plan ahead for your furnace needs. The process group is looking into possible alternative furnace resources. More information concerning these resources and a more definite start date will follow next week. Thanks you for your patience, Dick Details: The Thermco Bank 2 installation requires the bank 1-4 process and house gases to be turned off and lines purge to allow repositioning of existing gas lines and adding a few new tie-ins. The existing Tylan furnace can not be moved until the gas lines are cut. Since the toxic and house gases are regulated by Santa Clara County Building and Environmental Departments, all work must be tested and inspected according to their timetable. We will complete as much preliminary work as possible prior to shutting down gases. To minimize the downtime, we will be installing a new valve box servicing the toxic gas lines. Once installed, this action will allow the other furnaces to operate without concern of future Thermco Bank 2 installation activities. This action will affect the following tubes: (bank1) thermco1, thermco2, thermconitride1, thermcopoly1, (bank2) tylan5 (boron), tylan6 (phosphorous), teos2, tylansige, (bank3) tylanpoly, tylannitride, tylanbpsg, tylanfga, (bank4) tystar, teos. Tylan bank 1, the tylan oxidation furnaces, will not be affected by this action. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrgoldman at gmail.com Tue Mar 15 00:41:35 2005 From: jrgoldman at gmail.com (Jonathan Goldman) Date: Tue, 15 Mar 2005 00:41:35 -0800 Subject: =?ISO-8859-1?Q?Fwd:_MIT=B7Stanford=B7UC_Berkeley_Nanotechnology_Forum?= In-Reply-To: <20050311171920.78120CC@sm4app03.siteprotect.com> References: <20050311171920.78120CC@sm4app03.siteprotect.com> Message-ID: <42e33223050315004173b6d0b4@mail.gmail.com> I thought many of you would be interested in the following event which is on-campus this Thursday. ---------- Forwarded message ---------- From: announce at mitstanfordberkeleynano.org Date: Fri, 11 Mar 2005 11:19:20 -0600 Subject: MIT?Stanford?UC Berkeley Nanotechnology Forum To: info at mitstanfordberkeleynano.org The MIT?Stanford?UC Berkeley Nanotechnology Forum Presents... The First Event of the Year Nano-Sensor Networks Date: Thursday, March 17th, 2005 Time: Hors d'oeuvres and networking at 6:00 PM, program starts at 7:00 PM Cost: $10 Location: Frances C. Arrillaga Alumni Center, Stanford University. For directions and map follow this link. Info: For more info, send mail to info at mitstanfordberkeleynano.org Registration: Please register using the following link(s). The convergence of nanotechnology, RFID and information processing technologies is enabling the emergence of distributed networks of cheap and small sensors for real-time chemical and biological detection. The applications of these nano-sensor networks may revolutionize everything from supply chain management to homeland security. Silicon Valley is at the heart of many of these innovations and seems poised to play a critical role in the emergence of these new paradigms. Our next event will feature recognized innovators in this area who will talk to us about the future of detection technologies. Moderator Wasiq Bokhari, Managing Partner, Quantum Insight Panelists Professor Arun Majumdar, Almy & Agnes Maynard Chair Professor, Mechanical Engineering, UC Berkeley, President & CEO, Kalinex, Inc. H. Perry Fell, Ph.D., President & CEO, NanoString Technologies, Inc. Professor Nick Melosh, Assistant Professor of Materials Science, Stanford University ________________________________ Sponsors From ynzhao at stanford.edu Tue Mar 15 12:59:08 2005 From: ynzhao at stanford.edu (Yanan Zhao) Date: Tue, 15 Mar 2005 12:59:08 -0800 Subject: SOI wafer vendor Message-ID: <1110920348.42374c9c54230@webmail.stanford.edu> Dear lab members, i am looking for some vendors who have thin 4 inch SOIs. I need the device layer to be 1um/1.5um, N type. I tried a few but they only have wafers no thinner than 2um. please let me know if you know any vendors that may have it. Thanks very much. Sara From lian at stanfordalumni.org Tue Mar 15 14:55:30 2005 From: lian at stanfordalumni.org (Lian Zhang) Date: Tue, 15 Mar 2005 14:55:30 -0800 Subject: deep Cu and Al etch References: <1110920348.42374c9c54230@webmail.stanford.edu> Message-ID: <001e01c529b2$17cf5b70$3201a8c0@koilainc.com> Dear lab members, I am making a small device out of Cu or Al, that requires 10-20um deep etch into Cu or Al. Anisotropic etch will be perfect, but I think I can live with isotropic etch as well. Any information on the process (mask, etchant, etc.) will be very much appreciated! Thanks, Lian From levi at snowmass.stanford.edu Tue Mar 15 17:55:03 2005 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Tue, 15 Mar 2005 17:55:03 -0800 Subject: Ar Ion milling Message-ID: <6.1.2.0.2.20050315175007.05171210@snow.stanford.edu> Dear all, I am looking for a way to transfer pattern from an E-beam resist (PMMA or ZEP) to thin layer of Gold or Chrome (30-50 nm) below it. patterns are 200 nm diameter holes. The Chrome or Gold are used as hard mask for subsequent etching step of Nitride layer. The literature and some groups at USC suggest Ar Ion milling at 500 V. To the best of my knowledge we do not have such a capability. Did anyone use some of the equipment at SNF to do it, or knows of a system at Stanford that people are using for Ar Ion milling ? Please advise. Thanks , Ofer ______________________________________________ Ofer Levi, Ph.D. Department of Electrical Engineering, Stanford University CIS-X Rm 310, Stanford, CA 94305-4075 Phone: (650)723-0464 or 725-6907 Fax: (650)723-4659 Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 E-Mail: levi at snow.stanford.edu Web page: http://snow.stanford.edu/~levi/ ______________________________________________ From mdeal at stanford.edu Thu Mar 17 07:55:31 2005 From: mdeal at stanford.edu (Michael Deal) Date: Thu, 17 Mar 2005 07:55:31 -0800 Subject: Fwd: SNF/Stanford Community Day Message-ID: <6.1.1.1.2.20050317073510.01f5d4d0@mdeal.pobox.stanford.edu> SNF Labmembers and staff, Last week I sent out a message regarding SNF's upcoming participation in Stanford's Community Day (see message below), asking for volunteers. We still need help. Please let me know if you can spend a few hours or more on April 10. I'm sure it'll be fun for all. Also, we will have a planning meeting next Thursday at noon in CIS 101 for those volunteering to help on Community Day. We will provide pizza. Please let me know if you can attend this so I know how many pizzas to order. The meeting should only last 30-45 minutes. And even if you can't attend the meeting, you can still help at Community Day - just let me know. Thanks. -mike >Date: Wed, 09 Mar 2005 14:50:32 -0800 >To: labmembers at snf.stanford.edu >From: Michael Deal >Subject: SNF/Stanford Community Day >Cc: mdeal at stanford.edu > >SNF labmembers, > For the second year, SNF will participate in Stanford University's > "Community Day." This is where adults and children from the neighboring > cities are invited to Stanford on a Spring Sunday to visit the campus, > and dozens of university organizations put on displays and > demonstrations. Last year we had a very successful and fun day in which > we taught the community about nanotechnology. We had a table on the > other side of Packard where we had posters, free handouts > (ruler/magnifying glasses), microscope demos (where they could see > structure built in our lab), and the very popular "be a junior > nanoscientist (where kids put on a cleanroom suit, got the photo taken, > and got a nanoscientist certificate with their name and picture on > it.) We also gave tours of the cleanroom every few hours. > Last year it was mostly SNF staff helping with the activities. This > year I'd like to invite both staff and SNF labmembers to volunteer. The > more people who participate, the more fun it will be for all of > us. Community Day will be Sunday, April 10 from 10 am to 4pm. You can > work part or all of it (we'll need a few here at 9am to help set up). We > have lots of fun, and free lunch as well. > Based on the success of last year, and the fact that only 30% of > Community Day attendees are repeaters from before, we plan on doing > basically the same thing as last year. But we would entertain any > suggestions for other suggestions. We'll have a planning meeting, but it > isn't necessary to attend that in order to help out on the actual day. > So if you are interested in helping outand particpating in SNF's nano > activities at Community Day (April 10), please reply to me as soon as you > can. Thanks! > -Mike Deal, SNF > Director of Special Programs > From mdeal at stanford.edu Thu Mar 17 07:57:15 2005 From: mdeal at stanford.edu (Michael Deal) Date: Thu, 17 Mar 2005 07:57:15 -0800 Subject: Fwd: SNF/Stanford Community Day Message-ID: <6.1.1.1.2.20050317075629.01f77518@mdeal.pobox.stanford.edu> Just to be clear, the planning meeting is on March 24 at noon. -mike >Date: Thu, 17 Mar 2005 07:55:31 -0800 >To: labmembers at snf.stanford.edu >From: Michael Deal >Subject: Fwd: SNF/Stanford Community Day > >SNF Labmembers and staff, > Last week I sent out a message regarding SNF's upcoming participation > in Stanford's Community Day (see message below), asking for > volunteers. We still need help. Please let me know if you can >spend a few hours or more on April 10. I'm sure it'll be fun for all. > Also, we will have a planning meeting next Thursday at noon in CIS > 101 for those volunteering to help on Community Day. We will provide > pizza. Please let me know if you can attend this so I know how many > pizzas to order. The meeting should only last 30-45 minutes. And even > if you can't attend the meeting, you can still help at Community Day - > just let me know. Thanks. > -mike > > >>Date: Wed, 09 Mar 2005 14:50:32 -0800 >>To: labmembers at snf.stanford.edu >>From: Michael Deal >>Subject: SNF/Stanford Community Day >>Cc: mdeal at stanford.edu >> >>SNF labmembers, >> For the second year, SNF will participate in Stanford University's >> "Community Day." This is where adults and children from the neighboring >> cities are invited to Stanford on a Spring Sunday to visit the campus, >> and dozens of university organizations put on displays and >> demonstrations. Last year we had a very successful and fun day in >> which we taught the community about nanotechnology. We had a table on >> the other side of Packard where we had posters, free handouts >> (ruler/magnifying glasses), microscope demos (where they could see >> structure built in our lab), and the very popular "be a junior >> nanoscientist (where kids put on a cleanroom suit, got the photo taken, >> and got a nanoscientist certificate with their name and picture on >> it.) We also gave tours of the cleanroom every few hours. >> Last year it was mostly SNF staff helping with the activities. This >> year I'd like to invite both staff and SNF labmembers to volunteer. The >> more people who participate, the more fun it will be for all of >> us. Community Day will be Sunday, April 10 from 10 am to 4pm. You can >> work part or all of it (we'll need a few here at 9am to help set >> up). We have lots of fun, and free lunch as well. >> Based on the success of last year, and the fact that only 30% of >> Community Day attendees are repeaters from before, we plan on doing >> basically the same thing as last year. But we would entertain any >> suggestions for other suggestions. We'll have a planning meeting, but >> it isn't necessary to attend that in order to help out on the actual day. >> So if you are interested in helping outand particpating in SNF's >> nano activities at Community Day (April 10), please reply to me as soon >> as you can. Thanks! >> -Mike Deal, SNF >> Director of Special Programs From rissman at stanford.edu Mon Mar 21 07:49:56 2005 From: rissman at stanford.edu (Paul Rissman) Date: Mon, 21 Mar 2005 07:49:56 -0800 Subject: Coral down Message-ID: <5.1.1.5.2.20050321074704.0184ce48@rissman.pobox.stanford.edu> Hi All, Coral has gone down and we are presently working to get it back up. In the meantime if you need to get a piece of equipment going, please see Mario Vilanova. Thank you for your patience. Paul Rissman From bmurray at snf.stanford.edu Mon Mar 21 08:17:18 2005 From: bmurray at snf.stanford.edu (Bill Murray) Date: Mon, 21 Mar 2005 08:17:18 -0800 (PST) Subject: Coral down In-Reply-To: <5.1.1.5.2.20050321074704.0184ce48@rissman.pobox.stanford.edu> Message-ID: Paul, I have restarted the servers and everything is up and running properly. Bill On Mon, 21 Mar 2005, Paul Rissman wrote: > Hi All, > > Coral has gone down and we are presently working to get it back up. In the > meantime if you need to get a piece of equipment going, please see Mario > Vilanova. Thank you for your patience. > > Paul Rissman > From mdeal at stanford.edu Tue Mar 22 09:47:46 2005 From: mdeal at stanford.edu (Michael Deal) Date: Tue, 22 Mar 2005 09:47:46 -0800 Subject: SNF/Stanford Community Day Message-ID: <6.1.1.1.2.20050322094258.01f6b278@mdeal.pobox.stanford.edu> SNF labmembers and staff, We still need a few more volunteers to help with our Community Day activities on April 10 (see below for more details). Please, if you can spare a few hours, let me know as soon as you can. And there is a planning meeting this Thursday at noon in CIS 101 (with pizza) for those of you volunteering. Thanks. -mike >>Date: Wed, 09 Mar 2005 14:50:32 -0800 >>To: labmembers at snf.stanford.edu >>From: Michael Deal >>Subject: SNF/Stanford Community Day >>Cc: mdeal at stanford.edu >> >>SNF labmembers, >> For the second year, SNF will participate in Stanford University's >> "Community Day." This is where adults and children from the neighboring >> cities are invited to Stanford on a Spring Sunday to visit the campus, >> and dozens of university organizations put on displays and >> demonstrations. Last year we had a very successful and fun day in >> which we taught the community about nanotechnology. We had a table on >> the other side of Packard where we had posters, free handouts >> (ruler/magnifying glasses), microscope demos (where they could see >> structure built in our lab), and the very popular "be a junior >> nanoscientist (where kids put on a cleanroom suit, got the photo taken, >> and got a nanoscientist certificate with their name and picture on >> it.) We also gave tours of the cleanroom every few hours. >> Last year it was mostly SNF staff helping with the activities. This >> year I'd like to invite both staff and SNF labmembers to volunteer. The >> more people who participate, the more fun it will be for all of >> us. Community Day will be Sunday, April 10 from 10 am to 4pm. You can >> work part or all of it (we'll need a few here at 9am to help set >> up). We have lots of fun, and free lunch as well. >> Based on the success of last year, and the fact that only 30% of >> Community Day attendees are repeaters from before, we plan on doing >> basically the same thing as last year. But we would entertain any >> suggestions for other suggestions. We'll have a planning meeting, but >> it isn't necessary to attend that in order to help out on the actual day. >> So if you are interested in helping outand particpating in SNF's >> nano activities at Community Day (April 10), please reply to me as soon >> as you can. Thanks! >> -Mike Deal, SNF >> Director of Special Programs > From mbaran at stanford.edu Tue Mar 22 10:14:37 2005 From: mbaran at stanford.edu (Maureen Baran) Date: Tue, 22 Mar 2005 10:14:37 -0800 Subject: Calculator found in A Parking Message-ID: <200503221814.j2MIEbVu031343@smtp1.Stanford.EDU> Dear Labmembers, A calculator was found yesterday in the A parking across from Applied Physics. If this is your calculator please come by cubicle 41 and give me a more detailed description of it. Maureen Baran Stanford Nanofabrication Facility Lab Services Administrator mbaran at stanford.edu 650-725-3664 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at snf.stanford.edu Wed Mar 23 15:17:56 2005 From: shott at snf.stanford.edu (John Shott) Date: Wed, 23 Mar 2005 15:17:56 -0800 Subject: Coral outage over the weekend ... Message-ID: <4241F924.7010809@snf.stanford.edu> An HTML attachment was scrubbed... URL: From ankurjn at stanford.edu Wed Mar 23 15:18:52 2005 From: ankurjn at stanford.edu (Ankur Jain) Date: Wed, 23 Mar 2005 15:18:52 -0800 (PST) Subject: wirebonding on Titanium contact pads? Message-ID: Hello everyone, I would like to get wirebonding done between Titanium contact pads and a carrier having gold pads. The contact pads are fairly large (> 1 mm by 1 mm), but I am having difficulty sticking gold wire to the Titanium surface. Can someone with experience tell me how to do wire bonding on Titanium? Should I use a different wire? thanks, Ankur ************************************************************************* ANKUR JAIN Graduate Student Microscale Heat Transfer Laboratories Residence: Room 201, Building 530 126 Blackwelder Ct, Apt 902 Stanford, CA-94305 Stanford, CA - 94305 Ph: 650-736-0044 Cell Ph: 650-799-8986 http://www.stanford.edu/~ankurjn From shott at snf.stanford.edu Thu Mar 24 09:36:57 2005 From: shott at snf.stanford.edu (John Shott) Date: Thu, 24 Mar 2005 09:36:57 -0800 Subject: Coral instability and server reboot ... Message-ID: <4242FAB9.6080007@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Mar 25 15:08:31 2005 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 25 Mar 2005 15:08:31 -0800 Subject: wirebonding on Titanium contact pads? In-Reply-To: References: Message-ID: <424499EF.4050807@snf.stanford.edu> Hello: Likely the problems you are having bonding Au to Ti is from the native Ti02 oxide that rapidly forms on the Ti surface upon exposure to air on venting the system. If you can place an overlay layer on your structures I would recommend placing down Ti/Pt/Au contact over your Ti pad. I have used 250 Angstroms Ti/ 500 or 1000 A Pt/ 3000A Au all in the same pump down and deposition cycle. this structure is very easy to lift off as the Ti layer normally has some stress in it that will assist you. The Ti is the sacrificial diffusion barrier and also acts as an adhesion promotion layer; the Pt is a stuff diffusion barrier and acts to toughen up the film stack making more mechanically robust for the bonding operation; finally the Au acts as a malleable contact pad to wire bond to from your other pad. This is a robust and high temperature compatible overlay structure often used in the industry for GaAs devices working under high current densities or elevated temperatures. Typically used for Al Gate structures and over ohmic contacts to make compatible contacts to Au bonding wire connects. See me during my office hour if you have more questions, James Conway SNF Ankur Jain wrote: >Hello everyone, > I would like to get wirebonding done between Titanium contact pads and a >carrier having gold pads. The contact pads are fairly large (> 1 mm by 1 >mm), but I am having difficulty sticking gold wire to the Titanium >surface. Can someone with experience tell me how to do wire bonding on >Titanium? Should I use a different wire? > >thanks, > >Ankur > >************************************************************************* >ANKUR JAIN >Graduate Student >Microscale Heat Transfer Laboratories Residence: >Room 201, Building 530 126 Blackwelder Ct, Apt 902 >Stanford, CA-94305 Stanford, CA - 94305 >Ph: 650-736-0044 Cell Ph: 650-799-8986 >http://www.stanford.edu/~ankurjn > > From richyeh at sbcglobal.net Fri Mar 25 16:35:23 2005 From: richyeh at sbcglobal.net (Richard Yeh) Date: Fri, 25 Mar 2005 16:35:23 -0800 (PST) Subject: clariant AZ pos resist Message-ID: <20050326003523.83579.qmail@web81507.mail.yahoo.com> Dear fellow labmembers, Does anyone have any Clariant AZ positive resist and developer I can use (for ~5 wafers). I can order more resist/developer for you but need the material urgently. Please let me know if you have some to spare. Thanks in advance. Richard yeh at snf From john.wasserbauer at group4labs.com Mon Mar 28 15:04:35 2005 From: john.wasserbauer at group4labs.com (john.wasserbauer at group4labs.com) Date: Mon, 28 Mar 2005 17:04:35 -0600 Subject: Apiezon W wax Message-ID: <20050328230436.810A87C60@sm4app04.siteprotect.com> An HTML attachment was scrubbed... URL: From grupp at snowmass.Stanford.EDU Mon Mar 28 15:07:32 2005 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 28 Mar 2005 15:07:32 -0800 (PST) Subject: MEMulator Message-ID: Hello Everyone, Last month Coventor was here and gave an excellent presentation on MEMulator, their 3D MEMS process modelling software (it does cool things like 3D crosssections). We have an opportunity to get the software here for the community. SNF is providing a PC to be placed in the CAD room. We are getting a 90+% discount, and the cost is $1250. We need the support of a few groups (we have 3 now) to fund this. SNF may be able to contribute as well. The quote expires Thursday, so if you want to contribute, please contact me ASAP. Much Thanks, Dan --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- -------------- next part -------------- A non-text attachment was scrubbed... Name: MEMulator.pdf Type: application/pdf Size: 206133 bytes Desc: URL: From han-jun.kim at hp.com Mon Mar 28 15:36:59 2005 From: han-jun.kim at hp.com (Kim, Han-Jun) Date: Mon, 28 Mar 2005 15:36:59 -0800 Subject: polyimide in PRX-127? Message-ID: <6C21311CEE34E049B74CC0EF339464B90352DC@cacexc12.americas.cpqcorp.net> Hi, Does anyone know if PRX-127 can remove polyimide? Thanks for kind comment! Regards, Han-Jun ============================= Han-Jun Kim Hewlett-Packard Lab. 1501 Page Mill Rd, MS 1198 Palo Alto, CA 94304 (650) 857-8525 / 8948 FAX hjkim at hpl.hp.com ============================= -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Mon Mar 28 16:13:32 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 28 Mar 2005 16:13:32 -0800 Subject: Good news! Hitachi E-beam! Message-ID: <42489DAC.1010702@snf.stanford.edu> Labmembers: Good news -- it?s been a very, very long haul, but the Hitachi Ebeam system is now back up -- and running beautifully! Better than it has in years! So, just a few shoutouts to the people who made this happen. 1. Hitachi. They made a commitment to support us, which they did ? and more. They imported a couple of experts ? and charged us only ? of their regular rate (at cost.) 2. Ted Berg and Paul Jerabek. They worked tirelessly with Hitachi to make sure all the issues were addressed. And thanks also to everyone who helped by providing wafers and design files to test (James Conway and others.) But? Before you make that reservation? Please realize that the main problems with the system were due to mishandling by users. By all appearances, on different occasions, the cassette magazine was loaded backwards and/or upside down, the spider-like sample holder had fallen into one of the gears in the stage driver assembly, loading bearings were ripped out of their sockets. These repairs would have cost SNF $50K, had Hitachi not taken pity on us and cut their rates to half... The sample loading mechanism is a very finely machined assembly and all the parts should move smoothly and should not require any force. If you find something difficult to move, or if you feel uncomfortable with any aspect of loading/unloading, please contact Paul Jerabek or Ted Berg for a refresher session on handling. As fantastic a job they did in facilitating the repair on the Hitachi, I?m sure it?s not something they want to do again soon? Thanks for your attention ? Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at snf.stanford.edu Mon Mar 28 16:31:40 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 28 Mar 2005 16:31:40 -0800 Subject: ME342 Message-ID: <4248A1EC.809@snf.stanford.edu> Hi all -- Just wanted to give you advance warning that we'll be seeing an influx of students from ME342 in the lab starting next week. There will be large blocks of time on equipment (next week, it will be tylans 1 & 2 and wbdiff) reserved, possibly under different names, but the "Machine Reservation Information" pop-up should show "me342" in the project description. If you would like to see what the ME342 is up to, check out the class website at: http://www.stanford.edu/class/me342/a/index.html Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mjarrahi at stanford.edu Tue Mar 29 15:55:18 2005 From: mjarrahi at stanford.edu (Mona Jarrahi) Date: Tue, 29 Mar 2005 15:55:18 -0800 Subject: does anyone have a GaAs wafer? Message-ID: <1112140518.4249eae65e374@webmail.stanford.edu> Hi everyone, I am looking for a GaAs wafer for pre-testing my process. It should be ok if there are other structures sitting there, as far as we know what. I really appreciate your help. Cheers, -Mona