Ti deposition

Arash Hazeghi ahazeghi at stanford.edu
Mon May 2 11:28:57 PDT 2005


I want to prepare a substrate for carbon nanotube growth, the substrate 
will be SiO2/Ti/W/Ti/SiO2/Si-substrate, Ti is for better adhesion 
between SiO2 and W but I am not sure if Ti can withstand 900C 
temperature cycle needed for CNT growth, I would be pleased to hear 
your comments,

Thank you

Arash Hazeghi 

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