TiN etchant

Arief Suriadi Budiman suriadi at stanford.edu
Mon May 2 15:48:31 PDT 2005

Dear fellow labmembers,

I need to etch/pattern TiN - I'm wondering if anybody has etched TiN before
in the lab, and can share how to do that with me.

I haven't tried with the Ti/W etchant at the wbmetal, but has been told that
it will not work.

Looking forward certainly to hearing back from anybody who can help me with

Thanks and best regards,

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