TiN etchant

Arief Suriadi Budiman suriadi at stanford.edu
Mon May 2 15:48:31 PDT 2005


Dear fellow labmembers,

I need to etch/pattern TiN - I'm wondering if anybody has etched TiN before
in the lab, and can share how to do that with me.

I haven't tried with the Ti/W etchant at the wbmetal, but has been told that
it will not work.

Looking forward certainly to hearing back from anybody who can help me with
this.

Thanks and best regards,
suriadi



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