Silicon membrane thickness measurement

Jun Zheng jzheng at rheosense.com
Tue May 10 10:15:35 PDT 2005


Hi, Everyone:
 
I want to use FTIR to measure the Si membrane thickness on our device in
a very small area (0.5mm by 0.5mm). If anyone knows any place in
Stanford has such equipment, please let me know. 
 
Also if anyone have other ideal on how to measure it (Non-destructive),
please share your ideal with me. 
 
Thank you very much!
 
Jun Zheng







More information about the labmembers mailing list