TiW etchant

Yuan Zhang zhangy at stanford.edu
Fri May 13 16:02:11 PDT 2005


Hi all,

I want to do wet etch TiW layer after I patterned the sample with
photoresist. Has anyone tried this method before? What chemicals do you use
under what conditions? And whether photoresist will be removed either or
not?

Thank you for the help.

-Yuan

Yuan Zhang
EE department



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