Corosive gas sensor test Wednesday 1000-1030

Dick Crane rcrane at
Tue May 17 15:49:59 PDT 2005


This notice is addressed to users of corrosive gases: primarily etch 
tools and EPI reactor.

There will be a test of two toxic gas sensors tomorrow, May 18, between 
1000 and 1030. The test will cause a momentary shutdown of the corrosive 
gas vault. Staff will be on hand to reset the gases within two minutes. 
The test should not be noticeable by tool users. The amount of stored 
gas in the distribution system should continue to supply the tools 
during the test (HCl for the EPI reactor is an exception). This test 
concerns the HBr gas supply.

Thanks for your support,


More information about the labmembers mailing list