Corosive gas sensor test Wednesday 1000-1030
rcrane at snf.stanford.edu
Tue May 17 15:49:59 PDT 2005
This notice is addressed to users of corrosive gases: primarily etch
tools and EPI reactor.
There will be a test of two toxic gas sensors tomorrow, May 18, between
1000 and 1030. The test will cause a momentary shutdown of the corrosive
gas vault. Staff will be on hand to reset the gases within two minutes.
The test should not be noticeable by tool users. The amount of stored
gas in the distribution system should continue to supply the tools
during the test (HCl for the EPI reactor is an exception). This test
concerns the HBr gas supply.
Thanks for your support,
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