zygo dynamic measurement

Gary Yama (SNF) gyama at snf.stanford.edu
Thu May 19 08:31:48 PDT 2005

I'm trying to measure an out of plane 1kHz - 10kHz resonating diaphragm, 
1mm x 1mm.  Has anyone done this on the zygo?  If it is not possible, is 
there some other tool that may be around that can do this?

Thanks in advance - Gary

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