electromigration limit for thin film Ti?

Ankur Jain ankurjn at stanford.edu
Tue May 24 15:52:26 PDT 2005


Hello labmembers,
 Is anyone aware of the electromigration limit on current density for thin
film Ti? I have a 4 micron wide, 0.1 micron thick Titanium line, and
passing 1 uA or so of current makes it fail (it breaks at a sharp point,
where the line turns) within 1-2 hours. The devices seem to fail quicker
at low temperatures (around -50 C). Does anyone have similar prior
experience like this?

thanks,

Ankur.






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