Litho area temperature control work
rcrane at snf.stanford.edu
Wed May 25 06:59:56 PDT 2005
Temperature and humidity control for the HEPA air flow in the litho area
will be disrupted from 0700 to 0830, on Tuesday, May 31, while
Facilities and Operations personnel upgrade the uninterruptable power
supplies in the main control unit. If you need to execute a procedure
which is dimensionally critical you may wish to delay until later in the
morning. Current status will be posted at the fab entrance door.
Tuesday, May 31, 0700-0830, litho area, all aisles.
Thanks for your patience,
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