Litho area temperature control work

Dick Crane rcrane at
Wed May 25 06:59:56 PDT 2005

Fab users,

Temperature and humidity control for the HEPA air flow in the litho area 
will be disrupted from 0700 to 0830, on Tuesday, May 31, while 
Facilities and Operations personnel upgrade the uninterruptable power 
supplies in the main control unit. If you need to execute a procedure 
which is dimensionally critical you may wish to delay until later in the 
morning. Current status will be posted at the fab entrance door.

Shutdown schedule:
Tuesday, May 31, 0700-0830,  litho area, all aisles.

Thanks for your patience,


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