LTO wet etch rate

[Arash Hazeghi]

Hi,
I have some W wafers with ~2600A LTO 400 with normal 1um resist, I want to
etch LTO for ~2um using 6:1 or 20:1 Buff HF, does anyone know the etch rate
and PR/Oxide Oxide/W selectivity for Wbmetal?

Thanks,
Arash