hot plate vs. oven

SangBum Kim kimsangb at
Tue Nov 8 21:40:19 PST 2005

Dear labmembers,


 Just out of curiosity, how are the hot plate and oven different for the
postbake process after development? says 1 minute on the
hot plate and 25 minutes in the oven will work the same. Why can we use much
shorter time for the hot plate? When I tried to use 3612 as a wet etch mask
in 20:1 BOE, 25 minute oven baked sample worked better than 1 minute hot
plate baked sample.




-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the labmembers mailing list