Heat capacity of LPCVD Silicon Nitride films

Ankur Jain ankurjn at stanford.edu
Mon Nov 14 10:29:20 PST 2005


Hello labmembers,
 I am looking for information about the heat capacity of LPCVD Silicon
Nitride films deposited at SNF. In case you are aware of any data, I would
appreciate it if you could let me know.

thanks,

Ankur.



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