Electrochemical etch stop
kimsora at stanford.edu
Mon Nov 14 12:19:31 PST 2005
I am wondering if you have some experience of electrochemical etch stop.
I want to thin down several micron silicon into 0.5um. I would like to know that 0.5um is reasonable thickness to be achieved in terms of uniformity.
I also want to know the achievable smallest thickness.
Any small piece of advice will be very helpful.
Thank you very much.
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