Electrochemical etch stop

Sora Kim kimsora at stanford.edu
Mon Nov 14 12:19:31 PST 2005

Dear all,

I am wondering if you have some experience of electrochemical etch stop. 

I want to thin down several micron silicon into 0.5um. I would like to know that 0.5um is reasonable thickness to be achieved in terms of uniformity. 
I also want to know the achievable smallest thickness. 

Any small piece of advice will be very helpful. 

Thank you very much. 

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