HMDS removal

Li-Wen Chang lwchang at stanford.edu
Thu Nov 17 23:12:51 PST 2005


Dear labmembers,
Does any one know if the regular ebeam resist developing process will also strip the HMDS?

Thank you for your help,
Li-Wen
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20051117/7f0bbbf4/attachment.html>


More information about the labmembers mailing list