Selective Epitaxy of Silicon and SiGe

gaurav at ee.ucla.edu gaurav at ee.ucla.edu
Tue Nov 29 23:52:12 PST 2005


Hi all,

I am looking for someone, who is doing selective epitaxy of Si or SiGe
using ASM epi reactor. I want to discuss about recipe for SEG process. I
would really appreciate if someone can help me for making SEG recipe, who
has direct experience with it.

Thanks a lot.


~Gaurav Gupta




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