Selective Epitaxy of Silicon and SiGe

[gaurav at ee.ucla.edu]

Hi all,

I am looking for someone, who is doing selective epitaxy of Si or SiGe
using ASM epi reactor. I want to discuss about recipe for SEG process. I
would really appreciate if someone can help me for making SEG recipe, who
has direct experience with it.

Thanks a lot.


~Gaurav Gupta