spin coating liquid metal on quartz

Junxian Fu junxian at stanford.edu
Sun Oct 2 18:46:36 PDT 2005


Hi, all,
Is there anybody having experience on spin coating liquid metal (gallium, for example) on quartz? The goal is to make a relatively uniform layer (less than 1um) at temperature a little bit higher than room-temperature. How about the edge-beads and hump behavior? Relationship between spin speed and layer thickness?

Thanks a lot,
Junxian
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