any CVD tools to deposit carbon films?

Kai Ma kaima at
Mon Oct 10 14:32:08 PDT 2005

Dear labmembers,

I hope to deposit some carbon films in a CVD chamber. Browsed the snf
website but couldn't find a suitable tool. Does anybody know if there is a
CVD tool in Stanford community that have carbon-rich precursors to deposit
carbon films? It does not necessarily only exist inside CIS. Any
information lead is appreciated!

Many thanks!


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