questions on LOCOS process

[Steve Zhuang]

Dear Lab Members,

I have a couple of very basic questions regarding the LOCOS process:

1) What is the thickness of the oxide underneath the nitride layer.
2) What is the thickness of the nitride layer which can block the oxide diffusion efficiently?

If you happen to know the process, could you kindly let me know the answers?

Thanks!

Steve Zhuang

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