questions on LOCOS process

Steve Zhuang xzhuang at stanford.edu
Wed Oct 12 09:37:28 PDT 2005


Dear Lab Members,

I have a couple of very basic questions regarding the LOCOS process:

1) What is the thickness of the oxide underneath the nitride layer.
2) What is the thickness of the nitride layer which can block the oxide diffusion efficiently?

If you happen to know the process, could you kindly let me know the answers?

Thanks!

Steve Zhuang

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