PolySilicon question

Onur Kilic okilic at stanford.edu
Tue Oct 25 13:56:28 PDT 2005


I would like to use polysilicon for optical devices. Is there anyone who has
experience with getting an optical quality surface with some Poly receipe?
Also, do you know what kind of stress (tensile, compressive, ? MPa) one
gets with using such a receipe??

Your help is appreciated.

Thanks a lot,


Onur Kilic
PhD Candidate
Applied Physics
Stanford University

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