working with fused silica

Ping Zhang lscjblue at
Tue Sep 6 08:26:44 PDT 2005

Hello Adam E. Cohen,

  Normally BOE won't attack PR or hard cured polymer or polyimide. If you plan to use 49%HF,it may strip off SU8. You probably would like to try it on a Si wafer first to see if it will work or not.

Best regards,

======= At 2005-09-06, 09:36:47 you wrote: =======

>Hi All,
>    Does anybody know if it is possible to use SU 8 as an etch-mask for HF
>on fused silica?  More generally, if anybody has been making
>microstructures out of fused silica, I'd love to get in touch to compare
>notes.  Thanks in advance!
>Adam Cohen

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