working with fused silica
lscjblue at yahoo.com
Tue Sep 6 08:26:44 PDT 2005
Hello Adam E. Cohen,
Normally BOE won't attack PR or hard cured polymer or polyimide. If you plan to use 49%HF,it may strip off SU8. You probably would like to try it on a Si wafer first to see if it will work or not.
======= At 2005-09-06, 09:36:47 you wrote: =======
> Does anybody know if it is possible to use SU 8 as an etch-mask for HF
>on fused silica? More generally, if anybody has been making
>microstructures out of fused silica, I'd love to get in touch to compare
>notes. Thanks in advance!
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