W etch

Arash Hazeghi ahazeghi at stanford.edu
Thu Sep 22 13:47:16 PDT 2005


Hi,
I have a wafer with thick "~1um" CVD Tungsten and standard resist on, I 
want to etch Tungsten all the way to oxide with good selectivity and 
later measure the thickness, what is the best method to do this?

Thanks
Arash




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