about PRs in the etch rate chart

Hyeun-Su Kim aeonia at stanford.edu
Tue Sep 27 18:00:38 PDT 2005


Dear Lab members,

 

Is anybody familiar with photoresist name OCG 820 or Olin Hnt? I found these
names from etch rate chart http://snf/Process/WetProcessing/WetER2.pdf . I
am looking for good masking material for the glass wafer etching with HF in
wbgeneral. According to the chart, they seem to have zero etch rate in the
HF; however, I can't find any vendor who deals with them. They may be
discontinued or have different names now. Could you please share your
valuable experiences about these PRs or any good masking material for HF?
Thank you very much.

 

hyeun-su (aeonia)

 

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