Etching of Al2O3

Jenny Ruey-Chen Hu jennyhu at stanford.edu
Mon Dec 4 13:01:35 PST 2006


Hello SNF labmembers,

Does anyone have a recipe for etching Al2O3? I have 1000A Al on top of 10nm
Al2O3.

Do you know the selectivity of the Aluminum Etchant( WBMETAL ) between Al
and Al2O3?

Thanks for your help!

Sincerely,
Jenny



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