Etching of Al2O3

Jenny Ruey-Chen Hu jennyhu at
Mon Dec 4 13:01:35 PST 2006

Hello SNF labmembers,

Does anyone have a recipe for etching Al2O3? I have 1000A Al on top of 10nm

Do you know the selectivity of the Aluminum Etchant( WBMETAL ) between Al
and Al2O3?

Thanks for your help!


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