question on pad etch

Steve Zhuang xzhuang at
Thu Dec 14 12:28:56 PST 2006

Dear lab members,

I have a question on Pad Etch.  I want to use it to etch LTO.  In my case,
the LTO is on top of a layer of Al/Ti.  Does pad etch attach Al or Ti? 
Your input is highly appreciated.


Steve Zhuang
PhD student
Khuri-Yakub Group

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