Sputtered SiO2

James Q. Liu James.Q.Liu at jdsu.com
Fri Feb 3 15:12:52 PST 2006


Hi Shabbir,

 

You can try LGA Films (www.lgafilms.com <http://www.lgafilms.com/> ).
They have magnetron sputtering system. SiO2 is one of the targets they
have on hand. They also do ITO.

 

Good luck,

 

James

________________________________

From: shabbir.bashar [mailto:shabbir.bashar at nlight.net] 
Sent: Friday, February 03, 2006 1:56 PM
To: Eric Perozziello
Cc: labmembers at snf.stanford.edu; mtang at snf.stanford.edu;
latta at snf.stanford.edu
Subject: Sputtered SiO2

 

Eric,

 

Do you know some place where i can get SiO2 sputter deposited on InP
wafers?  It needs to be a good electrical isolator and an AR coating ...

 

Thanks!

 

=================

Shabbir A. Bashar, PhD

nLight Photonics Corp.

5408 NE 88th Street, Bldg. E

Vancouver, WA 98665

Cell: +1 510 386 7304

Office: +1 360 713 5145

Fax: +1 360 546 1960

E-mail: Shabbir.Bashar at nLight.net

Web: www.nLight.net <http://www.nlight.net/> 

 

 

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