resistance of Al2O3 to HF

Huang Kevin kevhuang at
Mon Jan 9 12:04:11 PST 2006

          Does anyone know what the etch rate of aluminum oxide (Al2O3) is
in HF solution (BOE or 49% HF)?  Does it etch a lot slower than SiO2 does in
HF or about the same?

Thanks for the help.

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