resistance of Al2O3 to HF

Huang Kevin kevhuang at stanford.edu
Mon Jan 9 12:04:11 PST 2006


Hi,
          Does anyone know what the etch rate of aluminum oxide (Al2O3) is
in HF solution (BOE or 49% HF)?  Does it etch a lot slower than SiO2 does in
HF or about the same?

Thanks for the help.

Kevin
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20060109/81e2be0c/attachment.html>


More information about the labmembers mailing list