SU-8 recipe

Kazuhiko Yamanaka yamanaka at
Thu Jan 12 10:17:38 PST 2006


I am trying to coat SU-8 on SOI wafer to make protect layer.
The thickness of SU-8 is from 1um to 5um.
Does anyone have the recipe of SU-8?

Thanks for your help,

Kazuhiko Yamanaka
Harris Group, Solid State & Photonics Lab,
Center for Integrated Systems,
Stanford University
CIS-X Rm 126X,
Stanford, CA 94305-4075
Tel :    (650)725-6909
Fax:    (650)723-4659
E-mail : yamanaka at

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