zhangy at stanford.edu
Mon Mar 6 11:06:37 PST 2006
We are going to deposite, pattern and etch Au in our process. I wonder if
anyone has any experience on Au etching. It seems to me Au is not very easy
to be etched by either wet etch or dry etch.
By the way, would you please let me know if you have any recipy about Pt
or Cr etch using any of the tools inside clean room? Thank you very much. I
really appreciate your help.
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