Au etch

Yuan Zhang zhangy at
Mon Mar 6 11:06:37 PST 2006

Dear labmembers,

We are going to deposite, pattern and etch Au in our process. I wonder if 
anyone has any experience on Au etching. It seems to me Au is not very easy 
to be etched by either wet etch or dry etch.

By the way, would you please let me know  if you have any recipy about Pt 
or Cr etch using any of the tools inside clean room? Thank you very much. I 
really appreciate your help.

Best Regards,


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