From mbaran at stanford.edu Mon May 1 13:59:08 2006 From: mbaran at stanford.edu (Maureen Baran) Date: Mon, 1 May 2006 13:59:08 -0700 Subject: A biege access card was found... Message-ID: <20060501205908.83C6F4C4D8@smtp3.stanford.edu> Dear Labmembers, A beige access type card was found near or in the Lab. If this card is yours, please come and claim it. Thank you, Maureen Maureen Baran Stanford Nanofabrication Facility Lab Services Administrator mbaran at stanford.edu 650-725-3664 -------------- next part -------------- An HTML attachment was scrubbed... URL: From scaccag at stanford.edu Tue May 2 10:29:09 2006 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 2 May 2006 10:29:09 -0700 (PDT) Subject: REMONDER: PhD Dissertation Defense tomorrow Message-ID: --------------------------------------- Department of Applied Physics University Ph.D. Dissertation Defense ALGAAS/ALOX-BASED SUBMICRON WAVEGUIDES AND RESONANT CAVITIES FOR NON-LINEAR OPTICS Luigi Scaccabarozzi Research Advisor: Professor J. S. Harris Wednesday May 3rd, 2006, 10:00 a.m. (Refreshments served at 9.45) CIS-X Auditorium, Room 101 ABSTRACT In fiber optics systems, such as Wavelength Division Multiplexing, there is an increasing need for fast, compact switches. Currently employed opto-electro-optical converters are relatively slow and power demanding. Non-linear optical devices, such as lithium niobate (LiNbO3) waveguides, can provide fast, all-optical wavelength conversion. However, because they require interaction lengths on the order of centimeters for high efficiency, they are not suitable for dense optical integration. Gallium Arsenide quasi-phasematched (QPM) waveguides have also been demonstrated, and although the interaction length is smaller (millimeters), they require a complex fabrication process. In this work we present the design, fabrication and characterization of a tightly confining, (AlGaAs)/aluminum oxide (AlxOy) non-linear waveguide device. AlGaAs has a nonlinear coefficient five times larger than LiNbO3 and a well-established fabrication technology. Moreover, passive and active devices could potentially be integrated to realize on-chip photonic circuits. Because of the high index contrast of the AlGaAs/AlxOy material system, phasematching can be achieved by artificial birefringence, greatly simplifying the fabrication process compared to QPM waveguides. This technique has been recently demonstrated. However, the conversion efficiency remained low, due to poor lateral confinement. We employed the AlGaAs/AlxOy material system to achieve both birefringent phasematching and sub-micron confinement. We developed a new fabrication process to realize high aspect ratio, extremely smooth AlGaAs/AlxOy structures, leading to low propagation loss (~2.5 dB/mm) at the fundamental wavelength. Normalized conversion efficiency larger than 20000 %/W/cm2, one order of magnitude larger than previously reported works, was obtained. Moreover, we showed that nonlinear effects can be further enhanced using a cavity embedded in the waveguide, resonant at the fundamental wavelength. For this purpose, a novel dichroic mirror that is highly reflective at the fundamental wavelength and has high transmission at the second harmonic wavelength was designed and fabricated. Ultra-compact (100-mm long) cavity devices have been realized and showed large resonant enhancements compared to plain waveguide devices. In conclusion, we demonstrated tightly confining, birefringently phasematched waveguides and resonant cavities with the highest normalized conversion efficiency ever reported. In addition, a novel dichroic mirror was developed, allowing large resonant enhancement of second harmonic generation. -- From vlordi at snow.stanford.edu Wed May 3 04:07:55 2006 From: vlordi at snow.stanford.edu (Vincenzo Lordi) Date: Wed, 3 May 2006 04:07:55 -0700 Subject: scrap 6" wafers Message-ID: Hello, I'm seeking donation of any scrap 6" wafers that consist of a finely-patterned blanket metal film as the top layer. Any pattern is acceptable, with feature sizes down to 1um preferable. Bare aluminum is not preferred (although may be acceptable); passivated Al or metals with conducting native oxides are better. I appreciate any help you can provide. -Vince From rcrane at stanford.edu Wed May 3 06:35:29 2006 From: rcrane at stanford.edu (Dick Crane) Date: Wed, 03 May 2006 06:35:29 -0700 Subject: Door install disaster Message-ID: <4458B1A1.6050600@stanford.edu> Labusers, Yesterday the main entry sliding door was replaced. What was suppose to be a well coordinated, minimum lab impact, early morning, 2-3 hour job became a late started, ill prepared, all day disaster. I'm sorry for the inconvenience suffered by users yesterday. Thanks for patience and cooperation in helping get through yesterday, Dick From mtang at stanford.edu Wed May 3 08:13:01 2006 From: mtang at stanford.edu (Mary Tang) Date: Wed, 03 May 2006 08:13:01 -0700 Subject: Fire Extinguiser Training Today! Message-ID: <4458C87D.1010803@stanford.edu> Hi everyone - Just a reminder that there's a fire extinguisher training class today -- there's still space, so if you're interested, just show up and check in with the Fire Marshall. The training session starts at 1:30 pm in CIS 101. Mary From ryantu at stanford.edu Wed May 3 17:42:46 2006 From: ryantu at stanford.edu (Ryan Tu) Date: Wed, 03 May 2006 17:42:46 -0700 Subject: Looking for a capacitance bridge Message-ID: Dear All, I am looking for a capacitance bridge (such as this one: http://www.andeen-hagerling.com/ah2700a.htm) to measure some devices. Please let me know If anyone has one that I could possibly borrow. Regards, Ryan Tu From shott at stanford.edu Thu May 4 09:47:23 2006 From: shott at stanford.edu (John Shott) Date: Thu, 04 May 2006 09:47:23 -0700 Subject: Reboot of computers at about 10 a.m. Message-ID: <445A301B.6080709@stanford.edu> An HTML attachment was scrubbed... URL: From mbaran at stanford.edu Thu May 4 11:12:10 2006 From: mbaran at stanford.edu (Maureen Baran) Date: Thu, 4 May 2006 11:12:10 -0700 Subject: Lost Silver Camera Cell Phone Message-ID: <20060504181210.5FD894C362@smtp1.stanford.edu> Dear Labmembers, Labmember, Mary Calarrudo has misplaced her silver camera cell phone. She last saw it in the gowning room yesterday (5/3/06). If you have found it please return it to Mary or to me. I am in cubicle 41, which is on the first floor of the CIS building. Thank you for your help in this matter. Maureen Baran Stanford Nanofabrication Facility Lab Services Administrator mbaran at stanford.edu 650-725-3664 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Thu May 4 15:32:41 2006 From: mtang at stanford.edu (Mary Tang) Date: Thu, 04 May 2006 15:32:41 -0700 Subject: Coventor Memulator Message-ID: <445A8109.9030208@stanford.edu> Hi everyone -- Last call for the Coventor MEMulator software license renewal on the CAD room PC: should we keep it, or not? So far, we've heard no enthusiastic "yesses", so it's not looking like a likely prospect... Please let me know if this is useful. Thanks, Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From aminn at stanford.edu Thu May 4 18:53:26 2006 From: aminn at stanford.edu (Amin Nikoozadeh) Date: Thu, 4 May 2006 18:53:26 -0700 Subject: Gold-contaminated STSetcher Message-ID: Hi all, I have some gold-contaminated wafers that I need to etch very deep trenches in. I want to know where I can find Gold-contaminated STSetcher. Any inputs are really appreciated. Thanks --Amin From mzi9890 at att.net Fri May 5 07:27:00 2006 From: mzi9890 at att.net (mzi9890 at att.net) Date: Fri, 05 May 2006 14:27:00 +0000 Subject: Gold-contaminated STSetcher Message-ID: <050520061427.11821.445B60B4000025D500002E2D2160375964CFC7C8C7079603@att.net> Amin, If you are willing to travel, I beleive UC Santa Barbara and also UCLA has gold contaminated DRIE machine. Mohammed -------------- Original message from "Amin Nikoozadeh" : -------------- > Hi all, > > I have some gold-contaminated wafers that I need to etch very deep trenches > in. I want to know where I can find Gold-contaminated STSetcher. > > Any inputs are really appreciated. > > Thanks > --Amin > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Mon May 8 11:47:47 2006 From: mtang at stanford.edu (Mary Tang) Date: Mon, 08 May 2006 11:47:47 -0700 Subject: Safety Fair: Thurs. 5/18 (Pizza, free goodies, and more!) Message-ID: <445F9253.9050900@stanford.edu> Greetings Labmembers! The School of Engineering will be holding its first Health and Safety Fair in the CISX patio, from 11-2 on Thursday, May 18. There will be info about earthquake preparedness, office ergonomics, protective equipment, and demos of emergency response procedures like CPR. There will also be free pizza and door prizes. AND -- Stanford's safety eyeware provider will have an optician on hand (from 9-12) to fit and dispense prescription safety glasses. If you are interested in obtaining prescription eyeware and would like to make an appointment here -- or if you have any other questions about the Health and Safety Fair, please contact Jackie Chan at 723-2137 or jackie.chan at stanford.edu. -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From kupnik at stanford.edu Mon May 8 14:50:28 2006 From: kupnik at stanford.edu (Mario Kupnik) Date: Mon, 8 May 2006 13:50:28 -0800 Subject: How to use vnc ? Message-ID: <003b01c672e9$6bef5030$6601a8c0@NBKUP> Dear labmembers, A couple of month ago I saw someone using VNC in the cleanroom to access his computer outside the cleanroom. This would be very convenient for me as well, because then I don't need to bring my (dirty) labtop inside. I tried it but I was not able to do it. I can access my laptop from everywhere else (also unix machines), except from the terminals inside the cleanroom. Please, let me know if someone of you know the reason why it does not work. BTW I tried it with realvnc: http://www.realvnc.com/ Thanks! Mario From jerabek at snf.stanford.edu Mon May 8 15:21:34 2006 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Mon, 8 May 2006 15:21:34 -0700 (PDT) Subject: new "Mask request form" Message-ID: To whom it may concern: We have posted a new "Mask request form" on the website, which has an additional field regarding CD's (critical dimensions). Please, when making a request, please fill in all the fields including the new one. I will no longer accept half filled requests. In my mailbox at my office I also have a hardcopy forms which reflect the same change. -Paul From alexneu at stanford.edu Tue May 9 18:06:35 2006 From: alexneu at stanford.edu (Alex Benjamin Neuhausen) Date: Tue, 9 May 2006 18:06:35 -0700 Subject: ITO Deposition and Patterning Message-ID: <1147223195.44613c9b71808@webmail.stanford.edu> Hello, I would like to deposit and pattern ITO on a quartz substrate with ~50 nm resolution. Does anyone know of facilities to do this on campus or have experience patterning ITO? I know there are a number of vendors who sell ITO films on quartz substrates, I'm more interested in doing my own evaporation/sputtering and etching/liftoff processes for this material. Thank you, Alex Neuhausen 571-643-8034 From rissman at stanford.edu Thu May 11 14:18:22 2006 From: rissman at stanford.edu (Paul Rissman) Date: Thu, 11 May 2006 14:18:22 -0700 Subject: gas system outage Message-ID: <6.2.5.6.2.20060511141638.0289b510@stanford.edu> Hi All, We are presently assessing the impact of the gas system outage. Unfortunately there are a number of key people out today, so we are unable to immediately get the lab back on line. Please be patient until further notice and I will let you know as soon as we have more information. Paul From mtang at stanford.edu Thu May 11 16:58:01 2006 From: mtang at stanford.edu (Mary Tang) Date: Thu, 11 May 2006 16:58:01 -0700 Subject: Announcement: Lab Shutdown 5/12/06 Message-ID: <4463CF89.2070205@stanford.edu> As Facilities and SNF staff try to troubleshoot the gas monitoring systems issues, the Fab is shut down and will remain so until further notice. Please be assured that we are continuing to work on this problem. Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From rissman at stanford.edu Thu May 11 19:19:29 2006 From: rissman at stanford.edu (Paul Rissman) Date: Thu, 11 May 2006 19:19:29 -0700 Subject: lab up Message-ID: <6.2.5.6.2.20060511191554.028f53e0@stanford.edu> Hi All, Sorry for the interruption of lab service. A UPS system on the safety controlled failed and it took some time troubleshooting to clear all of the alarms. All gasses in the lab are now up and available and the safety system is totally operational. Please use caution with your processes since the hydrogen and oxygen lines were off for a long time. Check that your process is working normally before committing your wafers. Paul Rissman From jhemanth at stanford.edu Sat May 13 23:52:57 2006 From: jhemanth at stanford.edu (Hemanth Jagannathan) Date: Sat, 13 May 2006 23:52:57 -0700 Subject: FW: Toxic Gases shutdown Message-ID: <000201c67723$0a353e20$0100000a@jhemanthibm1> -----Original Message----- From: pethe at stanford.edu [mailto:pethe at stanford.edu] On Behalf Of Abhijit Pethe Sent: Saturday, May 13, 2006 6:28 PM To: wbdiff at snf.stanford.edu Subject: Toxic Gases shutdown Hi, We had an alarm at the SNF Saturday 4:00pm. The alarm is clear but the toxic gases are off and need to reset by staff. FYI. Thanks Abhijit From rissman at stanford.edu Sun May 14 10:07:25 2006 From: rissman at stanford.edu (Paul Rissman) Date: Sun, 14 May 2006 10:07:25 -0700 Subject: lab up Message-ID: <6.2.5.6.2.20060514100411.02814780@stanford.edu> The toxic gasses in the lab are now up, with the exception of dichlorosilane (epi). All other processes in the lab should now be available. As always, use caution running your processes after a shutdown. We apologize for the service interruption. From kimsangb at stanford.edu Mon May 15 00:25:36 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Mon, 15 May 2006 00:25:36 -0700 Subject: TiN etch with good selectivity to sputtered oxide Message-ID: <005401c677f0$c26c4650$a9b50c80@anavel> Dear labmembers, I need to etch 100nm thick TiN on top of the 150nm sputtered oxide. Is there a TiN etching recipe that has a good selectivity to the sputtered oxide? Selectivity at least 1:1 is required since some sputtered oxide is exposed without any TiN on top. Thanks in advance! SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From xpxie at stanford.edu Mon May 15 11:02:13 2006 From: xpxie at stanford.edu (Xiuping Xie) Date: Mon, 15 May 2006 11:02:13 -0700 Subject: PhD Dissertation Defense Announcement ( Message-ID: <1147716133.4468c22593ba1@webmail.stanford.edu> Dear all, I'm defending tomorrow and I thought that some of you may be interested in the topic. Here are the details of my defense. Sorry if you receive this message more than once. ------------------ DEPARTMENT OF APPLIED PHYSICS UNIVERSITY PHD DISSERTATION DEFENSE Xiuping Xie Research Advisor: Professor Martin M. Fejer Title High Gain Parametric Processes in Quasi-Phase-Matched Proton-exchange Lithium Niobate Waveguides Tuesday 16 May, 2006 @ 1:00 pm (Refreshments served at 12:45pm) CIS Building, 101-X Auditorium ABSTRACT Developments in optical nonlinear materials and solid-state lasers led to the rapid progress in nonlinear optics in recent years. Among the many fields of nonlinear optics, c(2) parametric processes are among the major tools for generating coherent radiation indispensable in optical communication, spectroscopy and medical applications. Involving short pulses with high peak power, high gain c(2) parametric processes including optical parametric amplification (OPA) and optical parametric generation (OPG) have been widely used for near- and mid-infrared light sources, most of which so far have been demonstrated in bulk materials. At the same time, waveguide devices can significantly increase the parametric gain and have been widely applied in parametric processes such as second harmonic generation. However a thorough study of the usage of waveguides in high gain parametric processes is absent. This thesis addresses the challenges in such applications and demonstrates how quasi-phase-matched (QPM) gratings and waveguide structures can be tailored to improve performance of high gain parametric processes. We demonstrate high parametric gain for OPA in reverse-proton-exchange lithium niobate waveguides with periodically-poled QPM gratings. Picojoule OPG threshold with picosecond pump pulses near 780 nm is illustrated, which is over two orders of magnitude lower than that in bulk crystals. Furthermore we demonstrate control over the temporal properties of the output products from OPG with picosecond pump pulses near 780 nm. By synthesizing either the QPM gratings or the waveguide structures we demonstrate one order of magnitude smaller time-bandwidth products at designed wavelengths and obtain near transform-limited output from OPG. We also illustrate mode demultiplexing for OPA using asymmetric Y-junctions, in which the signal and idler in different waveguide modes are separated with a contrast of >27.5 dB. The high gain parametric processes in waveguides may therefore find more practical applications with the engineerable QPM gratings and waveguide structures. ----- Xiuping From rcrane at stanford.edu Wed May 17 11:04:03 2006 From: rcrane at stanford.edu (Dick Crane) Date: Wed, 17 May 2006 11:04:03 -0700 Subject: Welcome to new litho person Message-ID: <446B6593.3060106@stanford.edu> Litho area users and labmembers in general, I would like to take this moment to introduce SNF's newest employee, Changyol Lee. Chang will be working in maintenance in the litho area. He comes to us with a broad background of equipment knowledge from years at Samsung, AMD and Agilent Technologies. Next time you are in the fab, look for Chang with Mario or Mahnaz and say Hi. His phone number is 5-1685 and email address is still pending. Thanks, Dick From mtang at stanford.edu Wed May 17 17:09:08 2006 From: mtang at stanford.edu (Mary Tang) Date: Wed, 17 May 2006 17:09:08 -0700 Subject: Safety Fair 5/18/06 Message-ID: <446BBB24.5030003@stanford.edu> Greetings Labmembers! Just a reminder that the first SOE Safety Fair is tomorrow (Thursday) from 11-2 in the CISX courtyard. This is a great opportunity to check out prescription safety frames, and if you have a current prescription, you can order safety glasses from 9 to noon (contact Jackie Chan at jackie.chan at stanford.edu for more info.) For details about the safety fair, see: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2232:200605:ijkeamkogjpnococpihm Oh, and there's free pizza and door prizes. Hope to see you there! Your Safety-conscious SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Safety Fair Poster-small.pdf Type: application/pdf Size: 115125 bytes Desc: not available URL: From shott at stanford.edu Thu May 18 06:18:15 2006 From: shott at stanford.edu (John Shott) Date: Thu, 18 May 2006 06:18:15 -0700 Subject: New version of Coral ... Message-ID: <446C7417.8060501@stanford.edu> An HTML attachment was scrubbed... URL: From eap at gloworm.Stanford.EDU Thu May 18 00:26:10 2006 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Thu, 18 May 2006 00:26:10 -0700 (PDT) Subject: Electronic Data Logging Message-ID: Dear Fellow Labmembers, We've put together a website for electronic data logging of process results from equipment. The purpose is to collect process data in electronic format so that data can be sorted, graphed and quickly analyzed. We hope that this will provide many benefits: * early identification of equipment problems; * a simple method to enter and retrieve data, inside or outside the lab; * better feedback on your run, including automatic calculation of rates; * transparent conversion of HH:MM:SS format; * "backup" to your own laboratory notebook; * download of data in Excel format for sorting, graphing trends, etc; and, * better prediction of process results! USE: Please only enter reliable, measured data. This is NOT intended to replace the paper logsheets in the lab. Maintenance still uses the paper log sheets to determine tube cleaning cycles, and your estimates of thickness are appropriate there. The electronic data sheets hope to capture only measured, reliable data- Don't enter guesses here! Go To: http://www.lelandstanfordjunior.com/eData.html If you're in the lab, you should be able to access all functions of the website. Outside the lab, you will need to enter a password to access or post data. (This should hopefully cut down on email spam, etc). The User Name is "labuser". The password is likewise "labuser". Right now, there is only one machine on the list: TylanBPSG In the future, we plan to add more equipment as demanded. As with any community effort, this only works if you participate. So please feel free to use the data that others post, but also please contribute your results when you have them. You'll then have a backup of your own notes, and you'll get an instant dep rate calculation in addition to helping other labusers. Also on the site is a process sharing database, RunShare. More information is on the website. If you have any suggestions, comments, etc, please email me. Thanks, -Eric From bkyen at yahoo.com Thu May 18 11:59:59 2006 From: bkyen at yahoo.com (Bing K Yen) Date: Thu, 18 May 2006 11:59:59 -0700 (PDT) Subject: ZEP520 disappeared from Headway bench Message-ID: <20060518185959.64197.qmail@web34610.mail.mud.yahoo.com> SNF labmembers, I was using the Headway to spincoat my wafers with ZEP520 resist. After two wafers, the ZEP resist disappeared from the bench. In its place, there was a bottle of Triton X100, which looks very similar to the ZEP bottle. I am afraid that someone might have taken the ZEP bottle by mistake. I checked the cabinets and the fridge but couldn't find it. If someone knows the whereabouts of the ZEP bottle, please let me or James Conway know. Thanks, Bing (408-455-5447) p.s. I returned the Triton X100 back to the cabinet. __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From mtang at stanford.edu Thu May 18 15:12:17 2006 From: mtang at stanford.edu (Mary Tang) Date: Thu, 18 May 2006 15:12:17 -0700 Subject: Coral... Message-ID: <446CF141.503@stanford.edu> Labmembers -- It looks like Coral is not working in the lab right now. However, remote Coral appears to be working. There's a PC in the Ebeam lab which can be used for remote Coral access. If you are plannning to work in the lab today, you might want to bring a laptop with remote Coral. Many apologies for the inconvenience -- rest assured that the Coral team is on this. Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From rissman at stanford.edu Thu May 18 15:34:34 2006 From: rissman at stanford.edu (Paul Rissman) Date: Thu, 18 May 2006 15:34:34 -0700 Subject: Welcome Grace Wu Message-ID: <6.2.5.6.2.20060518153346.02a1d028@stanford.edu> Please welcome Grace Wu as the new lab finance manager of SNF. Grace comes to us after 5 years with Stanford's internal audit department. Prior to that she spent 2 years supporting Ginzton Laboratory. Grace holds a BA degree in economics from University of Minnesota and a MS in accounting from Central Michigan University. She also is a CPA. Grace is sitting in the office next to mine, CIS130. Her e-mail is gracewu at stanford.edu and she can be reached at extension 4-2909. If you have a chance, please stop by and introduce yourself to Grace. Paul Rissman P.S. If I have missed someone on the distribution please forward this message on. I am happy to announce that Grace Wu has joined SNF as the manager of financial services From rcrane at stanford.edu Mon May 22 15:29:08 2006 From: rcrane at stanford.edu (Dick Crane) Date: Mon, 22 May 2006 15:29:08 -0700 Subject: House N2 test 0700 5/25 Message-ID: <44723B34.2040201@stanford.edu> Labusers, There will be a brief test of house N2 gas pressure fall-off on Thursday, May 25, from 0700 to 0705. Gas pressure will drop from 120 psi to 90 psi as part of this test. Tools in the lab should not be affected by this test. If you have a super critical process to run, you wish to avoid the 0700-0705 time slot on 5/25. Most tools within the SNF fab use house grade N2. This test is being conducted to determine the extent of shutdown needed for a future N2 supply line repair to done in a few weeks from now. Thanks, Dick From mtang at stanford.edu Thu May 25 15:42:20 2006 From: mtang at stanford.edu (Mary Tang) Date: Thu, 25 May 2006 15:42:20 -0700 Subject: Brewer Science Presentation: 6/1/06 Message-ID: <447632CC.1090909@stanford.edu> Greetings labmembers -- Brewer Science will be presenting information about their MEMS product line of processing chemicals. This will take place next Thursday, June 1, at 10 am in CIS 101. Please see the description below. For more information, contact Shane Jones at sjones at brewerscience.com ***************************************************** * *Brewer Science* Brewer Science is a leading material and equipment supplier for the semiconductor, MEMS, compound semiconductor, and optoelectronic industries. In particular focus for the MEMS industry, Brewer Science has introduced a number of novel chemistry solutions including ProTEK^(TM), ProLIFT^(TM), and WaferBOND^(TM). ProTEK^(TM) is a spin applied material set designed to withstand KOH or HF etchants during the bulk micromaching process. ProLIFT^(TM) is a sacrificial material specifically designed to enable lift-off processes. The product remains soluble after exposure to high temperature making it an ideal material for metal lift-off processes. WaferBOND^(TM) is a new material developed to enable temporary wafer bonding processes. The material is design to cover topography, withstand common solvents used in MEMS processes, and facilitate rapid separation. In addition to these materials, Brewer Science has a diverse product base. The company plans to develop new materials to enable MEMS processes and is interested in learning the challenges in the MEMS community where novel materials are needed. We plan to provide a brief overview of the company and a technical presentation of our products. We would then discuss the broad needs of new materials within the MEMS community. -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Fri May 26 11:55:22 2006 From: mtang at stanford.edu (Mary Tang) Date: Fri, 26 May 2006 11:55:22 -0700 Subject: FSM Presentation: Shallow Junction Metrology 6/2/06 Message-ID: <44774F1A.9010704@stanford.edu> Labmembers: Dr. Michael Current, Director of Technical at Frontier Semiconductor (and one-time SNF labmember!) will be giving a presentation on "New Metrologies for Shallow Junction Engineering". This will take place in next Friday, June 2, at 10 am in CIS 101. Dr. Current will describe the non-contact methods developed at FSM, with examples of process issues associated with shallow junctions. For more information, please see the attached. Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: FSM.pdf Type: application/pdf Size: 128386 bytes Desc: not available URL: From suriadi at stanford.edu Mon May 29 17:20:13 2006 From: suriadi at stanford.edu (Arief S. Budiman) Date: Mon, 29 May 2006 17:20:13 -0700 Subject: Company for growing (bulk) single crystal Cr In-Reply-To: References: Message-ID: <1148948413.447b8fbdc10d2@webmail.stanford.edu> Dear fellow labmembers, I'm wondering if anyone knows companies (preferably in U.S) that grow high quality bulk Cr monocrystal. I know of one (by name of MONOCRYSTALS COMPANY of Medina, OH), but we've been experiencing unacceptable communications delay with them. I would really appreciate having suggestions/info from the labmembers as soon as your convenience. Thanks and best regards, Arief -- Arief Suriadi Budiman Ph.D Candidate Department Of Materials Science & Engineering Stanford University, CA http://www.stanford.edu/~suriadi Advanced Light Source (ALS) Ernest Orlando Lawrence Berkeley National Laboratory e-mail: asbudiman at lbl.gov http://www.als.lbl.gov From mtang at stanford.edu Tue May 30 13:04:39 2006 From: mtang at stanford.edu (Mary Tang) Date: Tue, 30 May 2006 13:04:39 -0700 Subject: Wet Bench Upgrades Message-ID: <447CA557.2030006@stanford.edu> Dear Labmembers: As you may be aware, SNF is in the process of upgrading the key the wet benches. We thought we?d take a moment to tell you more about these upgrades. The driving force is to upgrade the dump rinsers. As many labmembers have previously noted (ie., patiently complained), the dump rinsers are of various vintages and rinse to varying degrees of effectiveness over varying lengths of time? But as you might suspect, wafer rinsing technology has advanced significantly in last 25 years. The new dump rinsers are gentle spray/overflow, which has been shown to result in fewer particles (because there?s less static generated) and minimize damage, especially to MEMS devices. In addition, these are also more water-efficient ? largely because they are smaller as they are designed to hold one 6? cassette instead of two (don?t worry, extra replacement dump rinsers are being installed in high-use stations to handle peak demand.) And they have a built-in feature which allows monitoring of resistivity. Because the new dump rinsers have a smaller footprint, new layout and decking is required. So, we have also taken this opportunity to lower the decking by at least 1 ?? this is to increase headspace to make it easier to handle cassettes (especially 6?) and pour chemicals. Many other changes (consistency in layout between benches, improved access for maintenance, etc.) are also being incorporated as well. Funding for this upgrade has been provided by a rebate/grant from the Stanford Facilities & Operations group, as it is anticipated that the savings in DI water should pay for this upgrade within two years. The grant, however, stipulates that all upgrade work should be complete by the end of June in order to qualify, so that puts us on a time schedule. So far, wbmetal, wbnonmetal, and wbsilicide are now complete (if you haven?t done so already, check them out ? they are beautiful!) Granted, things haven?t gone quite as smoothly as we?d like and there are a few issues that still need to be addressed ? but we?d like to ask everyone to realize the complexity of this upgrade and the timeline under which it needs to be accomplished. Two more things. first, a word about logistics? ?wbdiff? is slated to be upgraded this week. ?wbsilicide? will serve as the backup until wbdiff is functional again. wbsilicide will be decontaminated this afternoon and will be unavailable for use as a semiclean station or for decontamination until wbdiff is back to general use. In coming weeks, wbnitride (which because of the nitride pot will not have a lowered deck) and wbmiscres/headway2 (which will have a stainless deck installed for cleanliness/contamination) will be upgraded -- Check the email archives/Coral for updates and other specific info. When you use these upgraded stations, please do take good care of them (clean up after yourself, rinse away any chemical drops, etc.) and do note any problems that you encounter. Second, Jim Haydon deserves ALL the credit for making this happen. While assembling wbgeneral2, he realized that the new dump rinsers could benefit the rest of the lab. He then consulted with process staff, did the research, and came up with the grant proposal to Facilities & Operations. He has also worked with lab- and staff- members to come up with improvements that could be incorporated with the basic upgrade. Thus, Jim?s project will not only have the environmental impact of saving water, but improve the safety and ergonomics for users and improve our ability to keep these stations clean and functional. (THANKS, JIM!!!) Again, we ask you for your forebearance and thank you for your patience while these upgrades are being done. Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Wed May 31 17:26:02 2006 From: mtang at stanford.edu (Mary Tang) Date: Wed, 31 May 2006 17:26:02 -0700 Subject: Brewer Science Presentation: 6/1/06 Message-ID: <447E341A.3060506@stanford.edu> Hi everyone -- Just a reminder that Brewer Science will be here to discuss their line of specialty MEMS-related chemicals. This will be at 10 am on Thursday, June 1, in CIS 101. (I believe they have even arranged for refreshments!) For more details, see here: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2251:200605:kdfgkimieddadednmodn Mary