ITO Deposition and Patterning

Alex Benjamin Neuhausen alexneu at
Tue May 9 18:06:35 PDT 2006

I would like to deposit and pattern ITO on a quartz substrate with ~50 nm
resolution.  Does anyone know of facilities to do this on campus or have
experience patterning ITO?  I know there are a number of vendors who sell
ITO films on quartz substrates, I'm more interested in doing my own
evaporation/sputtering and etching/liftoff processes for this material.
Thank you,

Alex Neuhausen

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