lab up
Paul Rissman
rissman at stanford.edu
Thu May 11 19:19:29 PDT 2006
Hi All,
Sorry for the interruption of lab service. A UPS system on the
safety controlled failed and it took some time troubleshooting to
clear all of the alarms. All gasses in the lab are now up and
available and the safety system is totally operational. Please use
caution with your processes since the hydrogen and oxygen lines were
off for a long time. Check that your process is working normally
before committing your wafers.
Paul Rissman
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