TiN etch with good selectivity to sputtered oxide

SangBum Kim kimsangb at stanford.edu
Mon May 15 00:25:36 PDT 2006

Dear labmembers,


 I need to etch 100nm thick TiN on top of the 150nm sputtered oxide. Is
there a TiN etching recipe that has a good selectivity to the sputtered
oxide? Selectivity at least 1:1 is required since some sputtered oxide is
exposed without any TiN on top. Thanks in advance!



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