FSM Presentation: Shallow Junction Metrology 6/2/06

Mary Tang mtang at stanford.edu
Fri May 26 11:55:22 PDT 2006


Dr. Michael Current, Director of Technical at Frontier Semiconductor 
(and one-time SNF labmember!) will be giving a presentation on "New 
Metrologies for Shallow Junction Engineering".  This will take place in 
next Friday, June 2, at 10 am in CIS 101.  Dr. Current will describe the 
non-contact methods developed at FSM, with examples of process issues 
associated with shallow junctions.  For more information, please see the 


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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