FSM Presentation: Shallow Junction Metrology 6/2/06

Mary Tang mtang at stanford.edu
Fri May 26 11:55:22 PDT 2006


Labmembers:

Dr. Michael Current, Director of Technical at Frontier Semiconductor 
(and one-time SNF labmember!) will be giving a presentation on "New 
Metrologies for Shallow Junction Engineering".  This will take place in 
next Friday, June 2, at 10 am in CIS 101.  Dr. Current will describe the 
non-contact methods developed at FSM, with examples of process issues 
associated with shallow junctions.  For more information, please see the 
attached.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

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