Shutdown of acid drains 10/9-10/10
Dick Crane
rcrane at stanford.edu
Thu Oct 5 15:18:02 PDT 2006
Labmembers and CISX labs users:
The acid waste neutralizer system which services both CIS (including the
SNF fab) and CISX buildings will be shutdown from 0600 on Monday,
October 9 until 1000 (exact turn-on time to be announced) on Tuesday,
October 10, for an emergency repair. This action will affect all lab
sinks, wet benches and fume hoods. The system has developed a leak in
one of its mixing tanks which will be repaired, tested and then
certified prior to returning to service.
Please do not use any acid waste drain lab sinks or wet benches after
0600 on Monday. Please do not resume operation until "system is up"
notices have been posted. Since the exhaust fume scrubbers operate using
recycled neutralizer waste water, our fume scrubbers will be down during
this repair. Exhaust air flow will be normal, but the fume loading needs
to be minimized. Please cover any and all chemicals in fume hoods to
reduce evaporation. Hot pots should be drained prior to 0600 on Monday.
SNF fab: All wet benches and SRDs will be down during the repair. This
will effectively shut down diffusion, wet etch, some of thin film and
some of the litho areas. What will be up and available includes litho
coat and develop tracks, exposure, ebeam, thin film dep tools (for
wafers not requiring a wet clean prior to loading), analytical tools,
and dry etch tools.
The details: The acid waste neutralizer system servicing CIS and CISX
buildings was built in 1983 and consists of two, 1,000 gallon mixing
tanks and a 500 gallon final sampling tank and lift tank. Tanks are
continuously checked for leaks via a floor level moisture detector. The
tanks are visually inspected weekly and checked annually. The center
tank has developed a seepage which needs to be repaired with a
fiberglass build-up. After repairs have cured, the tanks will be
hydrostatically tested and the certified by a PE from a tank inspection
firm.
Thanks for your cooperation and sorry for the inconvenience,
Dick
More information about the labmembers
mailing list