small grain size

Li-Wen Chang lwchang at
Tue Oct 17 00:18:48 PDT 2006

Dear labmembers,

I'm doing metal evaporation(innotec) into holes having diameter of 20nm.

I tried Al with 0.2A/s dep. Rate but didn't seem to work. The grain size of
the Al is much larger than the opening.

Does anyone know what metals would work for such case?

Any inputs would be highly appreciated.




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