small grain size
lwchang at stanford.edu
Tue Oct 17 00:18:48 PDT 2006
I'm doing metal evaporation(innotec) into holes having diameter of 20nm.
I tried Al with 0.2A/s dep. Rate but didn't seem to work. The grain size of
the Al is much larger than the opening.
Does anyone know what metals would work for such case?
Any inputs would be highly appreciated.
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