Au contaminated DRIE process for Si

Kris vossough at
Fri Oct 27 13:52:58 PDT 2006

Is there a Au contaminated DRIE process for Si that
anybody is aware of ?

We have a process that exposes DRIE plasma to Au film
for a little time. UCSB, IMT (Santa Barbara), SMI
(Milpitas) and Auburn University have declined this
job citing too much Au exposure to plasma. I would
appreciate any input or suggestions from the

Best Regards,

K. Vossough Ph.D.
Nano and Micro Technology Consultants
E-mail: vossough at
Voice: (408)373-5413
Fax: (650)798-5001

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