yellow lamp is lit

Masaharu Kobayashi masaharu at stanford.edu
Tue Aug 28 01:17:44 PDT 2007


Dear all,

When I drained HCl+H2O at wetbench silicide at 1am,
the yellow lamps were lit, which means over-limit of drain system.

If anyone would plan to clean wafers from now,
I am sorry for the inconvinience.

To staff:
I really appreciate if you fix this problem.

Best regards,

Masaharu Kobayashi



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