Vapor HF available?

Masaharu Kobayashi masaharu at stanford.edu
Wed Dec 5 09:17:49 PST 2007


Hello SNF members.

I would like to ask you if vapor HF is available in SNF or not.

Since there are a lot of MEMS people, I am expecting somebody use it.

I really appreciate any information on vapor HF.

Thank you

Masaharu Kobayashi




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