Vapor HF available?

J Provine jprovine at
Wed Dec 5 10:10:41 PST 2007

there is a vapor HF station at wbnitride that works very well.

Quoting Masaharu Kobayashi <masaharu at>:

> Hello SNF members.
> I would like to ask you if vapor HF is available in SNF or not.
> Since there are a lot of MEMS people, I am expecting somebody use it.
> I really appreciate any information on vapor HF.
> Thank you
> Masaharu Kobayashi


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