Fwd: Glycol Chiller Down

Paul Rissman rissman at stanford.edu
Mon Dec 10 08:29:18 PST 2007


Dear Labmembers:

As you can see from the attached, the power outage Friday night 
caused loss of the ability to control humidity in the lab for "about 
a week".  This means that there may be resist issues in lithography 
depending on the humidity for fine features.  Please inspect your 
wafers carefully if you are using the lithography equipment.

Paul Rissman

>X-Sieve: CMU Sieve 2.3
>Delivered-To: rissman at stanford.edu
>Delivered-To: rissman at snf.stanford.edu
>From: "Leonard Chan" <leonardc at bonair.stanford.edu>
>To: <rissman at snf.stanford.edu>
>Cc: <shott at snf.stanford.edu>, <mtang at snf.stanford.edu>,
>         "Ed Myers" <edmyers at stanford.edu>
>Subject: Glycol Chiller Down
>Date: Mon, 10 Dec 2007 08:19:29 -0800
>X-Mailer: Microsoft Outlook IMO, Build 9.0.6604 (9.0.2911.0)
>X-PMX-Version: 5.3.0.289146, Antispam-Engine: 2.5.0.283055, 
>Antispam-Data: 2007.12.10.80230
>X-PerlMx-Spam: Gauge=IIIIIII, Probability=7%, Report='__CT 0, __CTE 
>0, __CT_TEXT_PLAIN 0, __HAS_MSGID 0, __HAS_MSMAIL_PRI 0, 
>__HAS_X_MAILER 0, __HAS_X_PRIORITY 0, __MIME_TEXT_ONLY 0, 
>__MIME_VERSION 0, __SANE_MSGID 0, __USER_AGENT_MS_GENERIC 0'
>
>Paul,
>
>This is to inform you that we won't have dehumidification capability for
>about a week.
>I was told that the Cogen lost power to the cooling tower supplying water to
>our Glycol
>chillers. They will keep updated on their progress.
>
>Thanks,
>
>Leonard
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20071210/cf360e8b/attachment.html>


More information about the labmembers mailing list