Fwd: Glycol Chiller Down
rissman at stanford.edu
Mon Dec 10 08:29:18 PST 2007
As you can see from the attached, the power outage Friday night
caused loss of the ability to control humidity in the lab for "about
a week". This means that there may be resist issues in lithography
depending on the humidity for fine features. Please inspect your
wafers carefully if you are using the lithography equipment.
>X-Sieve: CMU Sieve 2.3
>Delivered-To: rissman at stanford.edu
>Delivered-To: rissman at snf.stanford.edu
>From: "Leonard Chan" <leonardc at bonair.stanford.edu>
>To: <rissman at snf.stanford.edu>
>Cc: <shott at snf.stanford.edu>, <mtang at snf.stanford.edu>,
> "Ed Myers" <edmyers at stanford.edu>
>Subject: Glycol Chiller Down
>Date: Mon, 10 Dec 2007 08:19:29 -0800
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>This is to inform you that we won't have dehumidification capability for
>about a week.
>I was told that the Cogen lost power to the cooling tower supplying water to
>chillers. They will keep updated on their progress.
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