Other options for Nitride / Oxide deposition?

Jonathan Edgar Roth jonroth at stanford.edu
Thu Feb 8 09:48:01 PST 2007



This morning STS PECVD's hard drive stopped working.  Does anyone know of
any other (external?) options for depositing silicon nitride and silicon
dioxide on pieces?  Thermal oxidation won't work for me.

Thanks.
Jon



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