Suss Spray Coater?

Mary Tang mtang at
Fri Feb 9 17:19:22 PST 2007

Hi everyone --

Several labmembers have expressed an interest in opening up a discussion 
about the possibility of obtaining a spray coater, designed to 
aerosolize resists to ensure conformal coating on substrates with 
extreme topography.  Suss offers a spray coater system that has been 
recommended by at least one interested party.  Spray coating has been 
demonstrated to be a great way to deposit even thick resists (even 
silicone elastomer) on topographies which cannot be coated by 
conventional spin coating.

More information is available on the Suss website at: -- 
and some cool photos can be seen in the attached brochure.

If this method sounds like something you could use, drop an email to 
either me or Mahnaz Mansourpour.  It would be helpful to know what your 
general application would be and exactly how interested (i.e., willing 
to commit funds or sweat equity) you and your lab might be in obtaining 
this capability here.

Thanks for your time and attention --


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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