Orals abstract Il Woong Jung

Andrew R Neureuther neureuth at eecs.berkeley.edu
Thu Feb 15 15:32:00 PST 2007


All,

Confirming that I will arrive by 1:45 Tomorrow.

I look forward to the presentation and discussion.

             Andy

Il Woong Jung wrote:
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> "Spatial light modulators for applications in coherent communication, 
> adaptive optics and maskless lithography"
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> Il Woong Jung, Dept. of Electrical Engineering
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> Advisor: Professor Olav Solgaard
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> Date: Friday, February 16th, 2007
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> Time: 2:00pm (refreshments served at 1:45pm)
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> Place: Packard 101
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> Abstract
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> Optical MEMS devices have been used in a variety of applications 
> including fiber optic communications, projection TVs and biomedical 
> imaging devices. MEMS-based spatial light modulators (SLM) provide a 
> compact, large scale, and cost-effective solution to these and other 
> applications. In this talk, we introduce the design and fabrication of 
> SLMs for three such applications. Coherent communications between ground 
> based stations and aircraft or satellites, and imaging/targeting of 
> objects at large distances (>1000km) require wavefront control to 
> correct for aberrations due to the atmosphere in addition to very fast 
> scanning ability. We introduce a tip-tilt-piston electrostatic combdrive 
> mirror array with the ability of the individual mirrors to do 
> 2-dimensional angular deflection as well as piston deflection for 
> scanning and wavefront control. Second, in NASA's program to search for 
> earth-like planets, an optical system with the wavefront corrected to 
> lambda/3000 at the detector is required. Image degradation is mainly due 
> to the polishing errors of the primary mirror in a space-based 
> telescope. To correct for the polishing errors we present a SCS 
> (single-crystal-silicon) continuous facesheet deformable mirror. In the 
> IC industry, as masks become prohibitively expensive, there is 
> motivation to use a programmable mask to reduce time and cost in the 
> development and production stage in IC manufacturing. For our third 
> application, we present a piston-type dual-lever actuator mirror array 
> as a programmable mask for maskless lithography. We demonstrate the 
> various capabilities of the SLM in optical pattern generation such as 
> sub-grid patterning, line-width modulation, checkboard generated lines 
> and spaces, and vortex vias. We also present a MEMS scanner with a 
> photonic crystal slab as a high reflectivity broadband mirror. Photonic 
> crystal slabs can achieve higher reflectivity and allow higher 
> processing temperatures than metals and are simpler to fabricate than 
> multi-layer dielectric stacks, which shows potential for wafer-scale 
> encapsulation of optical MEMS devices.
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> Il Woong Jung
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> Research Assistant
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> EL Ginzton Labs
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> 450 Via Palou S31
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> Stanford CA 94305
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> phone: 650-723-1992
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> email: iwjung at stanford.edu <mailto:iwjung at stanford.edu>
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