Orals abstract Il Woong Jung today at 2pm resfreshments 1:45

Il Woong Jung iwjung at stanford.edu
Fri Feb 16 13:47:11 PST 2007




"Spatial light modulators for applications in coherent communication,
adaptive optics and maskless lithography"


Il Woong Jung, Dept. of Electrical Engineering

Advisor: Professor Olav Solgaard


Date: Friday, February 16th, 2007

Time: 2:00pm (refreshments served at 1:45pm)

Place: Packard 101



Optical MEMS devices have been used in a variety of applications including
fiber optic communications, projection TVs and biomedical imaging devices.
MEMS-based spatial light modulators (SLM) provide a compact, large scale,
and cost-effective solution to these and other applications. In this talk,
we introduce the design and fabrication of SLMs for three such applications.
Coherent communications between ground based stations and aircraft or
satellites, and imaging/targeting of objects at large distances (>1000km)
require wavefront control to correct for aberrations due to the atmosphere
in addition to very fast scanning ability. We introduce a tip-tilt-piston
electrostatic combdrive mirror array with the ability of the individual
mirrors to do 2-dimensional angular deflection as well as piston deflection
for scanning and wavefront control. Second, in NASA's program to search for
earth-like planets, an optical system with the wavefront corrected to
lambda/3000 at the detector is required. Image degradation is mainly due to
the polishing errors of the primary mirror in a space-based telescope. To
correct for the polishing errors we present a SCS (single-crystal-silicon)
continuous facesheet deformable mirror. In the IC industry, as masks become
prohibitively expensive, there is motivation to use a programmable mask to
reduce time and cost in the development and production stage in IC
manufacturing. For our third application, we present a piston-type
dual-lever actuator mirror array as a programmable mask for maskless
lithography. We demonstrate the various capabilities of the SLM in optical
pattern generation such as sub-grid patterning, line-width modulation,
checkboard generated lines and spaces, and vortex vias. We also present a
MEMS scanner with a photonic crystal slab as a high reflectivity broadband
mirror. Photonic crystal slabs can achieve higher reflectivity and allow
higher processing temperatures than metals and are simpler to fabricate than
multi-layer dielectric stacks, which shows potential for wafer-scale
encapsulation of optical MEMS devices.



Il Woong Jung


Research Assistant

EL Ginzton Labs

450 Via Palou S31

Stanford CA 94305

phone: 650-723-1992

email:  <mailto:iwjung at stanford.edu> iwjung at stanford.edu







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