mask writer status

Paul Jerabek jerabek at snf.stanford.edu
Thu Jan 11 08:58:05 PST 2007


Micronic field engineering replaced burnt out power supply, which fixed the problem of stage interferometer. However in the process they destabilized the stage flying hight  (stage flies (moves) on a pillow of air). Flight hight is controled by pressurized air and has to be just 
right for stage to work properly. So far they were not successful in finding proper setup.
-Paul
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